Monocrystal Defectivity X-ray Diffractometry Apparatus (MDXDA) being the diffractometric analogue of X-ray topography is assigned for non-destructive quantitative express inspection of crystalline lattice defect density distribution.

MDXDA analysis locality is 0.5 mm2 which is sufficient for obtaining structure perfection quantitative parameters usable for technological purposes. Duration of a 150 mm diameter monocrystalline wafer inspection is from 15-30 s up to 2-3 min depending on resolution required. Automated MDXDA control and data processing is realized by IBM PC or built-in processor. MDXDA provides the possibility of simultaneous and independent measuring bulk and near-surface layer defect density distributions in plane of a monocrystalline wafer.

The installation is fully radiation-proof due to extremely low-power x-ray tubes and very narrow collimation of primary x-ray beams.